When the current is saturated, all the ions, produced, reach the plate.
Then,
(Both positive ions and negative ions are counted here)
The equation of balance is
The first term on the right is the production rate and the second term is the recombination rate which by the usual statistical arguments is proportional to n2 (= no of positive ions x no. of -ve ion). In equilibrium,
dn/dt = 0
So,